Olympus USPM-RU-W Series Operation Manual page 37

(2) Configure the layer.
The film thickness measurement can be selected from "Peak valley method (PV)",
"Fourier transform method (FFT)", and "Curve fitting method (FIT)" according to the
usage. The unit of the film thickness can select the optical film thickness and the
physical film thickness. A set item is different according to each mode of analysis and
the unit of the film thickness. The following table is confirmed, and the condition that
has adhered according to the mode of analysis is set. Please refer to 6.3 Layer
setting in the UPSM-SA Software Operation Manual for details of a set item.
Feature of each mode of analysis
Peak-valley method: [PV]
Feature of each A complex setting is unnecessary.
mode of analysis
Layer that can be Only the single-layer
measured
Set item of each mode of analysis
METHOD
UNIT
RANGE
THE NUMBER
LAYERS TO THAT IN THE
SAMPLE
THICKNESS
EXTINCTIVE INDEX
REFRACTIVE INDEX
PV8344F4E013
Two peak/ valley more is
necessary for the spectral
reflectivity.
PV
Optical Physical
thickness thickness
OF
Fourier transform
method: [FFT]
When the detection of
peak/valley of the
spectral reflectivity is
difficult, it is effective.
Single layer /multilayer
FFT
Optical Physical
thickness thickness
35
Curve fit method: [FIT]
It is possible to measure it
even if there is no peak/
valley in the spectral
reflectivity.
Single layer /multilayer
FIT
Optical Physical
thickness thickness