Olympus USPM-RU-W Series Operation Manual page 104

7.8.3. Curve fit method: FIT
The film thickness analysis method and analysis result for each layer are displayed on this
window when [FIT] (curve fit method) is selected for [Analysis method] on a LAYER setting
window. The [Method] field displays a film thickness analysis method and the optical film
thickness (physical film thickness) analyzed for each layer.
7.9.[THICKNESS INFO] window
The progress information of film thickness analysis is displayed on the [THICKNESS INFO]
window. See the [THICKNESS] window for the result of actual film thickness analysis.
The progress information of the film thickness analysis displayed on this window varies
depending on the setting state of [method] on a LAYER setting window. It is separately
described below.
7.9.1. Peak-valley method: PV
Detection points
Analysis data
Analysis data and detection points are displayed on this window when [PV] (peak-valley
method) is selected for an analysis method on a LAYER setting window. The analysis data is
the spectral measured value data to be analyzed for film thickness. It is the same as the
spectral measured value data displayed on a [GRAPH] window. The detection points display
the peak and valley positions of the analysis data used for film thickness analysis. Film
thickness is not also properly analyzed if the detection points are not properly displayed in the
peak and valley positions.
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