7.4 Lubricating Oil
If the oil level is lower than the lower limit line of the oil level gauge in typical check and
maintenance, supply the oil is needed.
Follow the steps below to supply the oil.
(1) Stop the pump and remove the closing board (LCD connector side ) on the pump.
(See Figs. 7.1)
(2) After you have waited until the internal pump pressure returns to
atmospheric (normal) pressure, remove the plug from the oil-filler inlet.
(See Figs. 7.2)
(3) Check the level through the window of the oil level gauge. Then, add the
oil so that the level is between the upper and lower limit lines (see Figs. 7.2
and 7.3).
(4) After you have checked that there are no depositions and fragments
adhering to the O ring attached to the plug, close the oil-filler inlet.
(5) Please check the air leak after supplying lubricating oil.
PM10U
Screw
Closing board
Fig. 7.1
How to remove closing board
P.83
EBARA
CORPORATION