Lubricant Oil - EBARA ESA300W Instruction Manual

Multi-stage dry vacuum pump
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(2)
When an exhaust gas scrubber unit is used, close the inlet valve of the
exhaust gas scrubber after the N2 gas purge has been discontinued and
then remove the piping.
(3)
Be sure to switch off the power supply.
(4)
After you have washed the piping do not reconnect until it has dried
completely.

8.4 Lubricant Oil

Do not start filling oil until the interior pump pressure has reached atmospheric
CAUTION
pressure. The chamber containing the oil is under low pressure (vacuum) so
that a significant leak will occur causing substantial damage to the pump when
the oil filling plug is removed with the pump operating
Waste oil shall be disposed of by industrial waste disposal dealer in accordance
CAUTION
with Material Safety Data sheets. (Appendix 1,2)
If the oil level is lower than the lower limit line of the oil level gauge in daily
inspection and maintenance, supply the oil is needed.
Follow the steps below to supply the oil.
(1)
Stop the pump and remove the outer side cover on the pump. (See Fig. 8.1)
Fig.8.1 How to remove pump covers
(60)
EBARA
CORPORATION

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Esa300w-h

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