Piping Maintenance; Lubricant Oil - EBARA A70W Instruction Manual

6.2 Piping Maintenance

Purge system with sufficient N
WARNING
vacuum lines and exhaust piping.
Prevent dispersal of flammable, toxic or dangerous materials and
guard against their contact with the human body.
Work only in locations with an emergency escape route.
Check for gas leaks after installing and maintaining the piping.
WARNING
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump
Dispose of process byproducts in strict accord with all local and
CAUTION
national environmental and safety regulations.
Follow the instructions below when carrying out maintenance work on the vacuum and
exhaust piping of the pump.
Before you remove and wash the piping, purge with a sufficient volume of N
On systems with an exhaust gas scrubber, interrupt N
scrubber before removing the piping.
Switch off the power supply.
After cleaning the piping, do not reconnect until it has dried completely.

6.3 Lubricant Oil

Do not start filling oil until the pump interior reaches atmospheric
CAUTION
pressure. During pump operation, the chamber containing the oil is
under vacuum. Removing the oil fill plug while the pump is running
will cause oil carryover and damage the pump.
A licensed industrial waste disposal dealer should dispose of waste
CAUTION
oil in accordance with Material Safety Data Sheet (Appendix 1).
Upon an OIL LEVEL LOW ALARM or whenever the lubricant oil needs replenishing, fill the oil
chamber and drain the oil that has collected in the secondary reservoir.
gas before removing and cleaning the
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purge and close the inlet valve of the
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EBARA Corporation
( 33)
gas.
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