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P.40
7.2 Inlet and outlet piping
Take the following precautions when performing the piping maintenance.
(1) Always turn off power supply.
(2) Dry the piping completely before installation if cleaning performed.
Pump remains hot during and/or after operation. Avoid direct skin contact otherwise it may
cause burn. Keep combustible materials away from the product. Do not attempt to service
the product when it is hot.
Do not remove packaging covers during operation.
Perform leak check after piping maintenance.
pressurize up to 0.05 MPa for pressure leak check.
7.3 Lubricant oil
Check oil level regularly. Oil level gauge is located at rear end of the pump. See diagram 7.1 Oil
level gauge position below.
The level may be lower than lower limit during the operation which is normal. Stop the pump and
wait until the level becomes stable, then check the level.
Inlet NW40
Cooling air outlet
Fig. 7.1 Oil level gauge position
PM10U
WARNING
Apply pressure form exhaust piping and
Outlet NW25
Oil level gauge
Photo 7.1 Oil level
Upper limit
lower limit
EBARA
CORPORATION
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