FX-1/FX-1R Maintenance Manual
12-4-3. Setting up the BIOS ......................................................................................................... 12-10
12-4-7
(status that the C drive has been updated previously.) .................................................... 12-38
13-1.
13-1-1. Part Names ........................................................................................................................ 13-1
13-2.
13-2-1. Part Names ........................................................................................................................ 13-2
13-3.
Power Supply Unit...............................................................................................13-3
13-4.
Control Unit .........................................................................................................13-6
13-4-3
13-5.
X-Y Unit.............................................................................................................13-22
13-5-3. Scale I/F Unit ................................................................................................................... 13-23
13-6.
Z-θ Unit .............................................................................................................13-25
13-6-2. LED Indications................................................................................................................ 13-26
13-7.
Transport Unit ...................................................................................................13-27
v
Rev. 2.00