Connecting The Water Cooling Pipe; Positions Of The Cooling Water Port - Edwards STP-iS2207 Series Instruction Manual

3.7

Connecting the water cooling pipe

3
Secure the connection pipe to prevent water leakage. The direction of cooling water (IN side / OUT
side) is not specified. And, use cooling water under the conditions provided in Section 2.3, "Water
cooling use condition". Install a secondly containment for liquids or a water leak detector in the place
(ex. cooling water ports) where cooling water may leak. Figure 27 shows the position of the cooling
water ports.
Install the valve to isolate (Lockout/Tagout) cooling water (Lockout/Tagout) at your company.
Note: Secure the connection pipe, and cool the STP pump.
Insufficient cooling of the pump may cause hot surfaces of the pump. Continuous pump
operation without cooling will detect a failure and stop.
MT-89E-001-C
Page 46
STP-iS2207 Series Turbomolecular Pump
Figure 27 - Positions of the cooling water port
Cooling water port