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ILLUSTRATIONS
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MT-89E-001-C
Page vi
STP-iS2207 Series Turbomolecular Pump
Title
Rotation instruction label
Cross sectional view of the STP pump
Jack-up the STP pump
Control unit bottom face
or slanted installed STP pump
Bolt position for securing the flange
Methods of securing the STP pump
Connecting method of the power cable
Baking heater installation position
"ROTATION" LED Indication
X3 connector (D-Sub9)
RS485 connections
Example of ring ferrite core installation
Example of cable installation in metallic duct
Example of differential signal waveform
PC to SIM communication
Block diagram of communication process example
Example of response when the command is sent continuously 88
Example of communication cycle process
Example of command sending process
Example of answer receiving process
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Troubleshooting
