Maintenance; Recommended Overhaul Intervals; Standard Replacement Parts - Edwards STP-iS2207 Series Instruction Manual

8.4

Maintenance

8.4.1

Recommended overhaul intervals

Regular overhaul (the cost of overhaul will be at your own charge) is required for safety and proper
use of STP pump.
The recommended intervals for different process applications are tabulated below:
Process
Etching *1 Metal etch process
(deposition)
Other etch process
Other semiconductor process
Clean application
Other use
*1
"Etching" includes semiconductor etching and LCD etching.
Note: When "First Damage Limit" warning or "Second Damage Limit" warning is detected, it is
essential to have the touch down bearings replaced regardless of the recommended
overhaul intervals. Warning detection is indicated by flashing of "FAILURE" LED (3 flashes in
orange), a message on the display unit iDT-001 (optional accessory) or the STP-Link
(optional accessory).
8.4.2

Standard replacement parts

When overhauling pumps, upper and lower touch down bearing, O-rings will be replaced as standard
replacement parts.
STP-iS2207 Series Turbomolecular Pump
Intervals
1 year Processes resulting in large amount of deposits in
the pump will require more frequent service
(includes non-etching process).
2 years
2 years
5 years No gases used (only vacuum pumping)
2 years Dependent on application, contact Edwards.
Remarks
MT-89E-001-C
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