Operation; Gas Pumping, Cooling And Baking The Stp Pump; Gas Pumping - Edwards STP-iS2207 Series Instruction Manual

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OPERATION

4.1

Gas pumping, cooling and baking the STP pump

Installation, operation and maintenance must only be executed by personnel who read through this
Manual carefully and have the specific skills to perform installation, operation and maintenance of the
STP pump.
4.1.1

Gas pumping

To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
When using pyrophoric gas, keep MSDS and a safety advice of gas supplier.
When pumping gases, they may remain in the STP pump. Exhaust all gases. Residual
gases can cause an accident if/when the pump is removed. Take measures according
to MSDS to prevent an accident when using toxic, reactive or combustible gases.
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
Cool the STP pump to prevent the STP pump from overheating when pumping gases.
Install cables so that personnel are not exposed to risk of tripping or falling.
STP-iS2207 Series Turbomolecular Pump
WARNING
and a safety advice of gas supplier.
WARNING
WARNING
CAUTION
following gases, contact Edwards:
gases.
CAUTION
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