Edwards STP-iS2207 Series Instruction Manual page 131

Parameter 6a 6b
F F 0
ASCII
46 46 30 30 30 30 30 30 30 30 30 30 30 30
HEX
Parameter 7a 7b
F F 0
ASCII
HEX 46 46 30 30
Parameter 22a 22b
F F 0
ASCII
HEX 46 46 30 30 30 30 30 30 30 30 30 30 30 30
*1 System reservation
STP-iS2207 Series Turbomolecular Pump
6c
0 0 0 0 0 0 0
0
22c
0 0 0 0 0 0 0
0 0 0 0 *1 *1 *1
21d
0 0 *1 *1 *1
30 30
22d
0 0 0 0
*1 *1 *1
6d
*1 *1 *1
*1 *1 *1
*1 *1 *1
MT-89E-001-C
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