Edwards STP-iS2207 Series Instruction Manual page 118

Example:
5
Pump operation mode
WARNING being detected
The number of error
Error 1
Error 2
Error 3 to 79
Parameter
ASCII
30 31 30 30 30 43 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30
HEX
Parameter
ASCII
30 30 30 30 30 30 30 30 30 30
HEX
Parameter
ASCII
30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30
HEX
MT-89E-001-C
Page 108
STP-iS2207 Series Turbomolecular Pump
: 01 = 1 = Levitation
hex
: 000C = 0004
hex
"WARNING: First Damage Limit" and
"WARNING: Imbalance X_H"
: 02 = 2 errors
hex
: 0D = 13 = Disturbance Xh
hex
: 0F = 15 = Disturbance Xb
hex
: 00 = No error detected
hex
1 2 3
0 1 0 0 0 C 0
11 12 13 14
0 0 0 0 0 0 0
75 76 77 78
0 0 0 0 0 0 0
OR 0080 =
hex hex
4 5 6
2 0 D 0 F 0 0
15 70
0 0 0 0 0
30 30 30 30 30 30 30 30 30 30
79 80 81
0 0 0 0 0 0 0
7 8 9 10
0 0 0 0 0 0 0
71 72 73 74
0 0 0 0 0 0 0
82
0 0
0
0