Edwards STP-iS2207 Series Instruction Manual page 130

Example:
5
In case of Disturbance X_H detection at September 13, 2007 12: 34
Parameter
0
ASCII
30 44 30 31 30 37 30 39 31 33 31 32 33 34
HEX
*3 System reservation
Example:
When 3 errors have been detected in the past;
The number of "Error Record":
The maximum number of "Error Record":
Error Record 1:
Error Record 2:
Error Record 3:
Error Record 4 to 20
Parameter
ASCII 0
30 33 31 34
HEX
Parameter
0
ASCII
30 46 30 30 30 37 30 39 31 33 31 32 33 34
HEX
Parameter
0
ASCII
30 44 30 30 30 37 30 34 33 30 30 36 35 39
HEX
Parameter
0
ASCII
30 46 30 30 30 36 31 32 30 31 31 35 30 38
HEX
MT-89E-001-C
Page 120
STP-iS2207 Series Turbomolecular Pump
a b
D 0 1 0 7 0
Error Code
Time flag
Error detection time
Error Code
Time flag
Error detection time
Error Code
Time flag
Error detection time
No error recorded
1 2
3 1 4
3a 3b
F 0 0 0 7 0
4a 4b
D 0 0 0 7 0
5a 5b
F 0 0 0 6 1
c
9 1 3 1 2 3 4
03 = 3 errors
hex
14 = 20 errors
hex
0F = 15 = Disturbance Xb
hex
01 =
Detection time is built-in clock time
hex
0709131234
hex
0D = 13 = Disturbance Xh
hex
01 =
Detection time is built-in clock time
hex
0704300659
hex
12 = 18 = MOTOR Overheat
hex
01 =
Detection time is built-in clock time
hex
0612011508
hex
3c
9 1 3 1 2 3 4
4c
4 3 0 0 6 5 9
5c
2 0 1 1 5 0 8
d
*3 *3 *3 *3 *3 *3
=
Sep. 13, 2007 at 12:34
=
Apr. 30, 2007 at 06:59
=
Dec. 1, 2006 at 15:08
3d
*1 *1 *1 *1 *1 *1
4d
*1 *1 *1 *1 *1 *1
5d
*1 *1 *1 *1 *1 *1