Error Message Values - Edwards STP-iS2207 Series Instruction Manual

Error message
[System reservation]
5
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
Aberrant Brake
Aberrant Accel
[System reservation]
[System reservation]
Inordinate Current
[System reservation]
Serial Com. Fail
[System reservation]
[System reservation]
*1 CAUTION or WARNING message. It is not a state of failure. Refer to Section 7 for details. The STP pump will continue to
operate after one of these messages is displayed. It is recommended that an application be designed with this in
consideration.
*2 When the setting value of serial communication timeout is 0, the error 78 is disabled (not detected).
MT-89E-001-C
Page 96
STP-iS2207 Series Turbomolecular Pump
Value
66
67
68
69
70
71
72
73
74
75
76
77
78 *2
79
80
Table 25 - Error message values (continued)
Error message
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
Overspeed 4
[System reservation]
[System reservation]
WARNING: Pump Run Time Over
WARNING: Pump Overload
[System reservation]
Other Warning 1 (C/U Restart)
Other Warning 2 (FAN Warning)
Value
81
82
83
84
85
86
87
88
89
90
91 *1
92 *1
93
94 *1
95
*1