Edwards STP-iS2207 Series Instruction Manual page 129

Turbomolecular pump
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1. In case of time flag = 0
Parameter
a
b
c
Pump running time
Control unit running time
d
*1 Value corresponding to the error is transmitted (see Table 24, Table 25). When the number of errors being detected is
under the maximum number, the value of parameter that is larger than the number of errors being detected is set to FFhex.
Example:
In case of Disturbance X_H detection at
Pump running time = 5,000 minutes, control unit running time = 6,000 minutes
Parameter
a
b
0
D
0
ASCII
30 44 30 30 30 30 30 30 31 33 38 38 30 30 30 30 31 37 37 30
HEX
2. In case of time flag = 1
Parameter
a
b
Error detection time
c
(Format:yymmddhhnn)
yy:
year
mm:
dd:
hh:
nn:
[System reservation]
d
*1 Value corresponding to the error is transmitted (see Table 24, Table 25). When the number of errors being detected is
under the maximum number, the value of parameter that is larger than the number of errors being detected is set to FFhex.
*2 Each value of time is transmitted as BCD form character string.
STP-iS2207 Series Turbomolecular Pump
Item
Error Code
Time flag
c
0
0
0
0
0
1
3
Item
Error Code
Time flag
The last two digits of the
Month
Day
Hour (24-hour display)
Minute
Data format
8-bits hexadecimal
coded ASCII
8-bits hexadecimal
coded ASCII
32-bits hexadecimal
coded ASCII
32-bits hexadecimal
coded ASCII
d
8
8
0
0
0
0
1
Data format
8-bits hexadecimal
coded ASCII
8-bits hexadecimal
coded ASCII
40-bits hexadecimal
coded ASCII
24-bits hexadecimal
coded ASCII
Remarks
*1
Unit: minute
Unit: minute
7
7
0
Remarks
*1
*2
MT-89E-001-C
Page 119
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