Recommended Maintenance Intervals For Main Parts - Edwards STP-iS2207 Series Instruction Manual

8.4.3

Recommended maintenance intervals for main parts

8
Internal components of the STP pump will be damaged from gas load, heat, and corrosion when
used long-term. Deterioration or abrasion of the internal parts of the STP pump will cause
unexpected failures. When overhauling the STP pump, replacement of main parts are recommended.
Refer to the following list as recommended maintenance intervals for main parts.
Rotor blades
Rotor shaft
Motor, sensor, electromagnet,
connector
Air-cooling fan
PCBA in the control unit
Accessories TMS valve
*1: Maintenance intervals of any parts may be shortened depending on the condition of use.
The costs of replacing parts that need to be replaced when deterioration or abrasion is observed will
be at the customers charge, even though a period is not exceeding the recommended maintenance
intervals.
When overhaul of the STP pump is needed, contact Service office.
MT-89E-001-C
Page 148
STP-iS2207 Series Turbomolecular Pump
Part name
TMS heater
Connection cable
Recommended maintenance intervals
Corrosive gas
vacuum pumping only
3 years
3 years
5 years
5 years
7 years
3 years
3 years
5 years
*1
Inert gas or
5 years
5 years
7 years