Edwards STP-iS2207 Series Instruction Manual page 105

Error message
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
Power Failure
Power Supply Fail
Overspeed 1
DRV Overvoltage
[System reservation]
CNT Overheat 1
DRV Overcurrent
DRV Overload
Disturbance X_H
Disturbance Y_H
Disturbance X_B
Disturbance Y_B
Disturbance Z
MOTOR Overheat
[System reservation]
CNT Overheat 2
[System reservation]
[System reservation]
[System reservation]
DRV Com. Failure
WARNING: 1 st Damage Limit
WARNING: 2 nd Damage Limit
START NOT ALLOWED
Speed Pulse Lost
Overspeed 2
Overspeed 3
M_Temp Lost
[System reservation]
STP-iS2207 Series Turbomolecular Pump
Value
0
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25 *1
26 *1
27
28
29
30
31
32
Table 24 - Error message values
Error message
AMB Com. Failure
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
WARNING: Imbalance X_H
WARNING: Imbalance X_B
WARNING: Imbalance Z
[System reservation]
[System reservation]
[System reservation]
[System reservation]
DRV Failure
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
Acc Mafunction
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
Value
5
33
34
35
36
37
38
39
40
41
42
43 *1
44
*1
45 *1
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
MT-89E-001-C
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