Technical Data; General; Performance - Edwards EPX HiVac Series Instruction Manual

Dry vacuum pumps
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(iiCWARCS
A419-00-880
Issue
K
2
Technical data
2.
1
Dimensions
Mass:
EPX
L
EPX
N
EPX
LE
EPX
NE
Inlet
General
Inlet fittings (not supplied)
Outlet
Ambient
operating temperature range
Maximum ambient operating
humidity
Noise level
Vibration
Maximum operating tilt angle
Handling
Maximum exhaust pressure
Minimum
exhaust
pressure
Lubricating oil
Ingress protection
2.
2
Performance
Warm-up time
(to nominal performance)
Peak pumping speed
Average ultimate
vacuum'
t
Maximum leak rate
Table 6 •
General
EPX180
EPX500
Refer to
Figure 12, 13, 14,
and
15
43.5 kg
45.5 kg
44.6 kg
46.6 kg
IS063
45.2
kg
47.2
kg
46.3
kg
48.3
kg
IS0160
One IS063 centring ring.
4 Claw clamps
One IS0160 centring ring.
8 Claw clamps
NW25
5 to 40
·c,
41 to 104
·
F
90% RH non-condensing
<56
dB(A)
<0.25 g
The pump must not be laid on its side or
inverted
Topple angle
>15.
<1200 mbar absolute
>500 mbar absolute
The EPX pump has a sealed lubricating oil system. For health and
safety information, refer to the Material Safety Data Sheet for
Fomblin
6/
6: MSDS
No.
P120-01-015.
IP44 (with inlet and
exhaust
connected)
(E-series pumps are rated to
IP40)
Table 7
Performance
EPX180
EPX500
30 minutes
Average peak pumping speed
175m
3
hr·
1
106.0 cfm
500m
3
hr·
1
294.3 cfm
<1 x
10
4
mbar,
<1 x 10·
6
mbar,
<1 x 10·
2
Pa,
<7.5 x
10·
5
Torr
<1 x 10·
4
Pa,
<7.5 x
10·
7
Torr
1 x 10·
5
mbar l
1
,
1
x 10·
3
Pal s·
1 ,
2.1 x 10·
8
atm ft
3
min·
1
The time taken to reach ultimate vacuum is dependent upon vacuum system cleanliness and foreline
conductance.
t
Average values are the mean
value
taken from a sample of typical production units.
©
Edwards Limited 2017. All rights reserved.
Page 15
Edwards
and t he
Edwards
logo
are trademarks of Edwards Limited.
n
QJ
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