Troubleshooting; Indication Of "Failure" Led (Red) - Edwards STP-iS2207 Series Instruction Manual

Turbomolecular pump
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7.6

Troubleshooting

7
7.6.1

Indication of "FAILURE" LED (red)

The flashing pattern of the "FAILURE" LED (red) differs depending on the type of abnormality/error.
When two or more failures are detected simultaneously, a high-priority failure is indicated. Also, the
failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is found, take
measures in accordance with Table 38 to Table 42. DO NOT perform operations not mentioned in
Table 38 to Table 42.
No
1
Power Failure
Overspeed, and other
2
MOTOR Overheat
CNT Overheat
3
DRV Overload
4
Disturbance
"FAILURE" LED indication
(steady in red)
MOTOR Overheat
(3 flashes in red)
(2 flashes in red)
X2 REMOTE output
FAILURE N.O OUT
FAILURE N.C OUT
Note:
The STP-Link (optional accessory) and the display unit (optional accessory) display an error
as a message. Also, the errors being detected can be read via serial communication.
MT-89E-001-C
Page 138
STP-iS2207 Series Turbomolecular Pump
Failure
Table 37 - Priority of failure signal
↓Failure detection
Power Failure
ON
Overspeed
OFF
ON
CNT Overheat
OFF
ON
DRV Overload
OFF
ON
Disturbance
(1 flash in red)
OFF
ON
(8)–(21)
OFF
ON
(9)–(21)
OFF
Figure 52 - Failure output
"FAILURE" LED
indication
Steady red
3 flashes in red
2 flashes in red
1 flash in red
1 cycle
Priority
High
Low
Corresponding to
failure type

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