Before Starting The Stp Pump; Confirmation Before Starting; Confirmation Of Vacuum System - Edwards STP-iS2207 Series Instruction Manual

4.4

Before starting the STP pump

4
NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF
(turn the MAIN POWER "OFF") while the STP pump is in rotation. DO NOT release the inlet port
flange or outlet port flange into the atmosphere while the STP pump is rotating.
4.4.1

Confirmation before starting

After completing installation, piping, leakage test of the STP pump, and wiring of the power cables, the
STP pump is ready for start.
1. Ensure the STP pump is installed correctly (refer to Section 3).
2. Ensure the correct supply voltage is applied.
3. Ensure all cables are securely connected and locked.
4.4.2

Confirmation of vacuum system

1. Starting backing-pump
Start the backing-pump before or simultaneously with the start of the STP pump. Open the vacuum
valve located at the outlet port flange side after starting the backing-pump.
Note: DO NOT open the vacuum valve without operating the backing-pump. Depending upon the
type of the backing-pump, doing so may cause a reverse flow of oil, which could contaminate
the inside of the STP pump.
Note: Avoid frequent start/stop operations as this may cause the STP pump to overheat.
2. Stop backing-pump
DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type of the
backing-pump, doing so could cause a reverse flow of atmospheric air into the STP pump, which may
Close the vacuum valve located at the outlet port flange side just before or after stopping the STP
pump. After closing the valve, stop the backing-pump.
Note: DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type
of the backing-pump, doing so could cause a reverse flow of oil, which could contaminate the
inside of the pump.
MT-89E-001-C
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STP-iS2207 Series Turbomolecular Pump
CAUTION
CAUTION
result in a malfunction.