Edwards STP-iS2207 Series Instruction Manual page 125

Parameter
Pump Overload Warning
11
Rotational speed setting
12 Serial communication
time out setting (Unit: sec.)
13 [System reservation]
*1 Valid only with TMS specification
the parameter value Fhex or the reading data of ReadOptionFunc (?=)
*2 Assign
Refer to Table 29, "Parameter setting value" for each parameter setting value.
The value is not reflected when a parameter is out of a setting range.
Example:
1. Input operation port:
2. TMS Option:
4. Second Damage Limit Option:
5. First Damage Limit Warning:
6. Pump Runtime Over Warning:
7. Pump Runtime Over Warning hours:
8. Imbalance Warning:
9. Pump Overload Warning:
10. Pump Overload Warning Motor current:
11. Pump Overload Warning Rotational speed: 0000
12. Serial communication time out:
Parameter 1 2
ASCII 0 1 F
HEX 30 31 46 46
Parameter 6
ASCII F F 0
HEX 46 46 30 30 30 30 30 33 45 38 30 30
Parameter 9
ASCII F F 0
HEX 46 46 30 33 45 38 30 30 30 30 30 30 33 43
STP-iS2207 Series Turbomolecular Pump
Item
01
FF
00
00
FF
000003E8
00
FF
03E8
003C
*1 *1 *1 *1 *1 *1
F
7
0 0 0 0 3 E 8
10 11
3 E 8 0 0 0 0
Data format
16-bits hexadecimal
coded ASCII
16-bits hexadecimal
coded ASCII
88-bits hexadecimal
coded ASCII
= I/O REMOTE
hex
= DISABLE
hex
= ENABLE
hex
= ENABLE
hex
= DISABLE
hex
= 1,000 (×100 hours)
hex
= ENABLE
hex
= DISABLE
hex
= 1,000 (×0.1%)
hex
= 0 (×0.1%)
hex
= 60 sec.
hex
3
*1 *1 *1 *1 *1 *1
8
0 0
12
*1 *1
0 0 3 C
Remarks
Default 0000
hex
(0.0%)
Default 003C
hex
(60 sec.)
*2
4 5
0 0 0 0
30 30 30 30
13
*1 *1 *1 *1
MT-89E-001-C
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