Edwards STP-iS2207 Series Instruction Manual page 48

3
MT-89E-001-C
Page 38
STP-iS2207 Series Turbomolecular Pump
1
2
3
5
1. Vacuum equipment
2. Inlet port flange
3. Washer
4. Torque reduction mechanism
5. Bolt insert position
Figure 21 - Bolt position for securing the flange
1
(i) When the base is
not secured
1. Recommended fitting bolt for flange
2. Secure the base (legs)
Figure 22 - Methods of securing the STP pump
4
2
(ii) When the base is secured