Edwards STP-iS2207 Series Instruction Manual page 4

CONTENTS (CONTINUED)
PAGE
ii
Section
3.9
3.9.1
3.9.2
4
4.1
4.1.1
4.1.2
4.2
4.2.1
4.3
4.4
4.4.1
4.4.2
4.5
4.6
4.6.1
4.6.2
4.7
4.7.1
4.7.2
4.7.3
4.8
4.9
4.9.1
4.9.2
4.9.3
4.9.4
5
5.1
5.2
5.2.1
5.2.2
5.2.3
5.2.4
5.2.5
5.2.6
5.3
5.3.1
5.3.2
5.3.3
5.3.4
5.3.5
5.3.6
MT-89E-001-C
Page ii
STP-iS2207 Series Turbomolecular Pump
Title
Connecting to semiconductor equipment
Connecting to power
Emergency off circuit (EMO circuit)
OPERATION
Gas pumping, cooling and baking the STP pump
Gas pumping
How to introduce a purge gas
Cooling the STP pump
Water-cooling method
Baking the STP pump
Before starting the STP pump
Confirmation before starting
Confirmation of vacuum system
Powering ON
Pump operation
Input operation port setting
Starting/stopping the STP pump
How to start/stop the STP pump
Starting the STP pump after stopping
Starting the STP pump after a safety function operates
Powering OFF
LED
Parallel port input/output signal
Input signal pins
Input operation port setting
Second speed option
Output signal pins
SERIAL COMMUNICATION PROTOCOL
Introduction
Connection and setting up
Signal connection
Connecting the RS485
Communication parameter setting
Input operation port setting
Serial communication timeout setting
Recommended items about communication cable installation 74
Protocol specifications
General description
Standard transmission frame
(in the RS232/RS485 single point connection)
Control command
(in the RS232/RS485 single point connection)
Query command
(in the RS232/RS485 single point connection)
Transmission data format
Frame control (checksum)
Page
48
48
48
49
49
49
50
50
50
51
52
52
52
53
53
53
54
55
55
55
55
56
57
57
60
61
62
67
67
68
68
70
71
72
73
77
77
78
79
80
81
82