Vacuum Piping Method; (For The Stp Pump Equipped With Purge Port); Height Of Purge Port - Edwards STP-iS2207 Series Instruction Manual

3.5.1

Vacuum piping method

1. Attach the inlet port to the high vacuum side.
(Refer to Section 2.1, "STP pump specification" for maximum working pressure).
2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
(Refer to Section 2.1, "STP pump specification" for allowable backing pressure).
Note: Maximum flow for water cooled is applicable under the condition listed in Section 2.3, "Water
cooling use condition".
3.6 Introducing N gas (for the STP pump equipped with purge port)
2
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
into the STP pump in order to protect the inside of the STP pump. To isolate (Lockout/Tagout) the
purge gas N , introduce a dry N
2
valve (must be prepared by the customer) from the purge port.
When exhausting a gas which has low heat conductivity such as Ar gas, the temperature of rotor
blade will increase. Introduce a dry N
decrease the temperature of rotor blade and exhaust the large amount of Ar gas.
For instructions on how to introduce the purge gas, see Section 4.1.2.
Inlet port
VG250 / ISO250F
flange
h
STP-iS2207 Series Turbomolecular Pump
gas through the electromagnetic vent. valve, needle valve or similar
2
gas into the STP pump through the purge port in order to
2
h

Height of purge port

VG200 / ISO200F
ICF253
266
Figure 26 - Height of purge port
ICF305
311 291
gas or other gas
2
MT-89E-001-C
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