Edwards STP-iS2207 Series Instruction Manual page 30

The STP pump should be installed in an area which meets the following requirements:
3
Ambient temperature
Ambient relative humidity
Environment
STP pump installation
equipment conditions
MT-89E-001-C
Page 20
STP-iS2207 Series Turbomolecular Pump
0 to 40 °C (32 to 104 °F)
30 to 95% (no dew condensing)
An area free of externally applied mechanical shock.
A place free of a heat source (Keep clear of the heat source or
attach a thermal shield plate).
A place free of a strong magnetic field (Range: up to 15 mT (150
G) in the axial direction, and up to 3 mT (30 G) in the radial
direction with respect to the rotational axis of the STP pump).
A place free of a strong electric field.
A place free of exposure to radiation.
No discharge of high voltage (more than 500 V) (If more than 500
V is discharged, contact Edwards).
Others: An area free of exposure to direct sunlight, high humidity,
dust, water drop, salty air, explosive or flammable gas, corrosive
gas, excessive vibration and sources of electric noise.
A place at an altitude of 2,000 m or less.
Install the STP pump securely so that foreign materials cannot fall
into the STP pump (Ex.: Si wafers or samples are positioned above
the STP pump) (To prevent foreign materials from falling into the
STP pump, design a shield plate with large conductance).
Install the STP pump so that the inlet flange of the STP pump not to
be exposed to heat source. (Install the heat shield plate so as to
prevent the effect by radiation heat)
Good example:
Heat shield plate
Table 1 - Environmental requirements for installation
Bad example:
None