CONTENTS (CONTINUED)
PAGE
iv
Section
6
6.1
6.2
7
7.1
7.1.1
7.1.2
7.1.3
7.1.4
7.1.5
7.1.6
7.1.7
7.1.8
7.2
7.2.1
7.3
7.3.1
7.3.2
7.3.3
7.3.4
7.3.5
7.3.6
7.4
7.5
7.5.1
7.5.2
7.6
7.6.1
7.6.2
7.6.3
8
8.1
8.2
8.3
8.4
8.4.1
8.4.2
8.4.3
8.5
MT-89E-001-C
Page iv
STP-iS2207 Series Turbomolecular Pump
Title
Safety functions
"WARNING" function
Maintenance and inspection
Page
127
127
128
129
129
129
130
131
131
131
131
131
132
132
132
134
134
134
134
135
135
135
136
137
137
137
138
138
144
144
145
145
146
146
147
147
147
148
149