Example:
5
TMS temperature:
Motor temperature:
Motor current:
Measured rotational speed:
Control unit temperature :
Parameter
ASCII
*1
HEX
Parameter
*1
ASCII
HEX
Parameter
ASCII
0
HEX
30 30 31 34
Parameter
ASCII
*1
HEX
*1 System reservation
MT-89E-001-C
Page 110
STP-iS2207 Series Turbomolecular Pump
0046
0014C
19
hex
01C2
0032
*1
*1
*1
*1
*1
*1
*1
1
*1
*1
*1
*1
*1
*1
*1
3
4
5
0
1
4
*1
*1
1
9
31 39
8
*1
*1
*1
*1
*1
*1
*1
= 70 ºC (158ºF)
hex
= 20 ºC (68ºF)
hex
= 2.5A
= 450 Hz = 27,000 rpm
hex
= 50 °C
hex
1
*1
*1
*1
*1
*1
*1
*1
2
0
0
4
*1
*1
*1
*1
30 30 34 36
6
*1
*1
*1
*1
*1
*1
0
30 31 43 32
9
0
0
3
*1
*1
*1
*1
30 30 33 32
*1
*1
*1
6
7
1
C
2
2