Pump Operation Mode - Edwards STP-iS2207 Series Instruction Manual

5
Example:

Pump operation mode

The number of error
Error 1
Error 2
Error 3 to 80
Parameter
ASCII
HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30
Parameter
ASCII
HEX 30 30 30 30
Parameter
ASCII
HEX 30 30 30 30 30 30 30 30 30 30 30 30 30 30
MT-89E-001-C
Page 98
STP-iS2207 Series Turbomolecular Pump
Pump operation mode
Levitation
No Levitation
Acceleration
Normal
Deceleration (Brake)
Autotest
[System Reservation]
[System Reservation]
[System Reservation]
[System Reservation]
[System Reservation]
Table 26 - Pump operation mode
: 01 = 1 = Levitation
hex
: 02 = 2 errors
hex
: 0D = 13 = Disturbance Xh
hex
: 0F = 15 = Disturbance Xb
hex
: 00 = No error detected
hex
1 2 3 4
0 1 0 2 0 D 0
12 13 68
0 0 0 0 0
30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30
76 77 78 79
0 0 0 0 0 0 0
Value
5 6 7
F 0 0 0 0 0 0
69 70 71
0 0 0 0 0 0 0
80 81 82
0 0 0 0 0 0 0
1
2
3
4
5
6
7
8
9
10
11
8 9 10
0 0 0 0 0 0 0
72 73 74
0 0 0 0 0 0 0
11
0
75
0