Warning Value Bit Assign - Edwards STP-iS2207 Series Instruction Manual

STP-iS2207 Series Turbomolecular Pump
Bit Warning message
0 [System reservation]
WARNING: Second Damage Limit
1
WARNING: First Damage Limit
2
WARNING: Imbalance X_H
3
WARNING: Imbalance X_B
4
WARNING: Imbalance Z
5
WARNING: Pump Run Time Over
6
WARNING: Pump Overload
7
[System reservation]
8
[System reservation]
9
[System reservation]
10
[System reservation]
11
[System reservation]
12
[System reservation]
13
WARNING: Other Warning
14
[System reservation]
15
*1
FAN Warning or C/U Restart
Table 28 - Warning value bit assign
16-bits hex value
0001
0002
0004
0008
0010
0020
0040
0080
0100
0200
0400
0800
1000
2000
*1 4000
8000
5
MT-89E-001-C
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