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STP-iS2207 Series Turbomolecular Pump
Item
STP-iS2207 / STP-iS2207C
2
Safety function
Electromagnetic bearing failure detection
STP pump overheat detection
Motor driver overload detection
Power failure detection
STP pump overspeed detection
Control unit overheat detection
Other failure detection
MT-89E-001-C
Page 15
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Troubleshooting
