Technical Data; Applicable Pump Specifications; Stp Pump Specifications - Edwards STP-XF803 Series Instruction Manual

STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
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TECHNICAL DATA

1.1

Applicable pump specifications

Model Name
STP-XF803BV135 / XF1303BV135
STP-XF803BV155 / XF1303BV155
STP-XF813Y1BV155 / XF1313Y1BV155
STP-XF813Y2CV155 / XF1313Y2CV155 Extreme High-flow type
*1
Corrosion resistant: STP pump with anti-corrosive treatment.
*2
High-emissivity coating: STP pump with rotor covered with high-emissivity coating.
*3
Special material / coating: STP pump with special material and coating.
*4
Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
temperature with the thermistor in the turbomolecular pump, and performing the TMS heater ON/OFF control in order to
maintain a constant temperature of the STP pump.
*5
The dedicated control unit for STP-XF803/XF1303/XF813/XF1313 series.
1.1.1 STP pump specifications
The following specifications are available for STP-XF803 / XF1303 series pumps.
STP-XF803BV135
STP-XF1303BV135
STP-XF803BV155 [A]
STP-XF1303BV155 [A]
STP-XF803BV155 [B]
STP-XF1303BV155 [B]
STP-XF813Y1BV155
STP-XF1313Y1BV155
STP-XF813Y2CV155
STP-XF1313Y2CV155
Specification
Extreme High-flow type
Corrosion resistant type
High-emissivity coating type
*3
TMS unit
Corrosion resistant type
Special material/coating type
*4
TMS unit
TMS Heater TMS Valve
set point （⁰C） set point （⁰C）
135 85
145 75
150 85
150 93
140 93
Applicable Control unit
5
SCU-800/801 *
*1
*2
5
SCU-800/801 *
*1
*3
Rated speed
Remarks
（rpm）
28,000 Section 1.1.1.1
28,000 Section 1.1.1.2
25,000 Section 1.1.1.3
28,000 Section 1.1.1.4
28,000 Section 1.1.1.5
MT-92E-101-C
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