1.6 ionKey source.................................................................................................................................30
1.8.3 System operation.................................................................................................................. 33
1.9 Ion optics........................................................................................................................................ 33
1.10 Leak sensors................................................................................................................................ 35
1.11 Vacuum system............................................................................................................................ 35
2.1.3 Calibration.............................................................................................................................38
2.2.4 Purging the pump..................................................................................................................42
2.5 Emergency shutdown.....................................................................................................................43
March 31, 2021, 715004496 Ver. 04 (previously released as Rev. D)
Page xiii