Piping; Vacuum And Exhaust Piping - EBARA ESA70W Instruction Manual

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4.2 Piping

4.2.1 Vacuum and Exhaust Piping

Connect the vacuum and exhaust pipes to the suction and exhaust flanges.
A narrow clearance is maintained in the pump for rotor rotation. The ingress of
foreign objects into the pump interior will therefore prevent the pump from
operating. Be sure therefore to heed the following cautions when making the pipe
connections.
a) Remove all foreign matter from inside the piping.
b) When connecting be sure that no dirt or dust particles adhere to the flange
surfaces and/or that the flange surfaces are damaged.
Provide a suitable means of preventing the ingress of reaction by-products
adhering to the APC valve and wafer fragments. For this purpose, a filter may
be installed.
c) The weight of the pipes attached to the pump can cause misalignment and
leaks from the flange connections. Be sure therefore to support the piping
properly and not to apply undue force when aligning the flange faces.
It is recommended to insert flexible bellows when connecting the pipes to the
suction and exhaust flanges of the pump.
The length of the flexible bellows on the vacuum (suction) side will vary
according to the vacuum drawn. Be sure to connect so that no undue force
can be applied to the flexible bellows.
WARNING
Leaks will cause serious danger due to the discharge of harmful and
hazardous substances and the occurrence of unpredictable
reactions associated with the admission of air into the pump. When
checking for gas leaks by pressurization, please pressurize by less
than 0.05 MPa into the purge port and do check.
Be sure to check for leaks after you have installed the pump.
EBARA
Corporation