Important Prior Warnings - EBARA ESA500W Instruction Manual

DANGER
WARNING Be careful not to overturn the pump when pushing and pulling it
WARNING All electrical works must be performed by only a qualified
WARNING Interrupt Earth Leakage Breaker (ELB) before starting on wiring
WARNING Supply N2 gas to the exhaust piping when necessary to dilute
WARNING Purge with sufficient N2 gas before removing and washing the
WARNING Do not use the pump for another process without a previous
WARNING Pump oil may be contaminated with process byproducts. Treat it as
PM10U

Important Prior Warnings

Keep out from under the pump when lifted.
Only qualified personnel shall unload and lift the pump.
Keep pump at horizontal position when lifted.
Do not lift the pump without eyebolt spacer.
sideways, because the width of the pump is small to its height.
electrician.
All national and local electrical regulations must be observed.
and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
the inflammable or toxic gas up to a safe concentration.
vacuum and exhaust piping.
Do not let inflammable, toxic or dangerous materials
disperse and guard against contact with the human body.
Always work in a location with an escape route in an emergency.
overhaul. Gases or reaction products remaining in the pump will
react and lead to accidents with the formation of large amounts of
products.
a hazardous waste. See Table 3.1 for oil quantities.
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EBARA
CORPORATION