Pump Operation Mode - Edwards STP Series Instruction Manual

STP-iX457/iXU457 Series Turbomolecular Pump
Example:

Pump operation mode

The number of error
Error 1
Error 2
Error 3 to 80
Parameter 1 2
ASCII 0 1 0
HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30
Parameter 12 13
ASCII 0 0 0
HEX 30 30 30 30
Parameter 76 77
ASCII 0 0 0
HEX 30 30 30 30 30 30 30 30 30 30 30 30 30 30
Pump operation mode
Levitation
No Levitation
Acceleration
Normal
Deceleration (Brake)
Autotest
[System Reservation]
[System Reservation]
[System Reservation]
[System Reservation]
[System Reservation]
Table 29 - Pump operation mode
: 01 = 1 = Levitation
hex
: 02 = 2 errors
hex
: 0D = 13 = Disturbance Xh
hex
: 0F = 15 = Disturbance Xb
hex
: 00 = No error detected
hex
3 4 5
2 0 D 0 F 0 0
68 69
0 0 0 0 0
30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30
78 79 80
0 0 0 0 0 0 0
Value
1
2
3
4
5
6
7
8
9
10
11
6 7 8 9
0 0 0 0 0 0 0
70 71 72 73
0 0 0 0 0 0 0
81 82
0 0 0 0
10 11
0 0 0 0 0
74 75
0 0 0 0 0
MT-86E-001-F
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