Figure 7.1 Stp Pump Operation Procedures - Edwards STP-L301 Series Instruction Manual

Turbomolecular pumps
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<Operation>
Breaker ON
Start operation of the
STP Pum p
<M anual O peration>
STP pum p can be started w ith
either m essage displayed:
"LEVITATIO N"
"BR AKE: ***00rpm "
<R em ote O peration>
STP pum p can be started w ith
any m essage displayed.
N orm al operation state
Stop operation of the
STP Pum p
The STP pum p can be stopped
by m anual or rem ote operation
w ith any m essage displayed.
*1
: When the SELECT switch is pressed with this message displayed, the message changes to "RATING:48,000 rpm", and when
pressed again, to "PUMP TEMP:***℃".
*2
For the setting of the rated speed, see Section 9.2, "Setting the Rated Speed".
<STP Pum p State>
Execute Self Test
Levitation state
Acceleration state
Brake state

Figure 7.1 STP Pump Operation Procedures

STP-L301/L451 Series Instruction Manual
< LC D M essage>
P021*
Ver.*.**
SELF TEST
TEST C OM PLETE
LEVITATION
SELEC T Sw itch
R ATIN G: 48000 rpm
SELEC T Sw itch
PU M P TEM P: **°C
The m essage displayed can be
changed by pressing the
"SELEC T" sw itch.
LEVITATION
AC C EL: ***00rpm
NORMAL:48000 rpm
BR AKE: ***00rpm
7-9
Version
Self test in progress
Self test com pleted
*1
Levitation state
Set value of rated speed
STP pum p internal tem p.
*1
Acceleration state
N orm al operation state
*1
Brake state
*2
*1

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