Pump Operation Mode - Edwards STP-iXA3306C Manual

5
Example:

Pump operation mode

The number of error
Error 1
Error 2
Error 3 to 80
Parameter
ASCII
HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30
Parameter
ASCII
HEX 30 30 30 30
Parameter
ASCII
HEX 30 30 30 30 30 30 30 30 30 30 30 30 30 30
MT-82E-001-H
Page 110
STP-iXA3306 Series Turbomolecular Pump
Pump operation mode
Levitation
No Levitation
Acceleration
Normal
Deceleration (Brake)
Autotest
Tuning
Tuning Complete
[System Reservation]
Table 38 - Pump operation mode
: 01 = 1 = Levitation
hex
: 02 = 2 errors
hex
: 0D = 13 = Disturbance Xh
hex
: 0F = 15 = Disturbance Xb
hex
: 00 = No error detected
hex
1 2 3 4
0 1 0 2 0 D 0
12 13 68
0 0 0 0 0
30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30
76 77 78 79
0 0 0 0 0 0 0
Value
9, 10, 11
5 6 7
F 0 0 0 0 0 0
69 70 71
0 0 0 0 0 0 0
80 81 82
0 0 0 0 0 0 0
1
2
3
4
5
6
7
8
8 9 10 11
0 0 0 0 0 0 0
72 73 74 75
0 0 0 0 0 0 0
0
0