EBARA ESA70W Instruction Manual page 41

(28)
ALARM name
MP casing temp. high
BP motor temp. high
MP motor temp. high
MP no current
BP no current
Backpressure high(
▲)
Phase error
Emergency off(
▲)
EXT. interlock
IO communication error
Table 6.2 Alarm code list
Code
1st 2nd
WARNING name
code code
50 01 Cooling water flow low
51 00 MP casing temp. high
52 00 BP oil level low
60 00 MP oil level low
61 00 Pump box temp. high
63 00 Pump N
64 00 Back pressure high(
71 00 Back pressure sensor damaged(
74 00 IO communication error (IO board)
81 00 IO communication error (C_IO board)
MP current high
BP current high
"▲" indicates that the item is optional.
flow low
2
▲)
EBARA
Code
1st 2nd
code code
00 01
05 01
06 00
08 00
13 00
18 01
21 01
21 02
▲)
26 03
26 07
31 15
31 14
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