EBARA ESA70W Instruction Manual page 40

Multi-stage dry vacuum pump
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BP:##.##A
MP:##.##A
▽ △
ALARM:CASING
TEMP .HIGH
▽ △
CONTROL:LOCAL
MODE:NORMAL
▽ △
ALARM/WARNING
HISTORY?
▽ △
UNIT NO.
&&&&&&&&
▽ △
OPE.TIME
#### h
▽ △
BACK PRESSURE
##.# kPa
▽ △
PUMP N2 FLOW
##.# Pam3/s
▽ △
WATER FLOW
##.# L/min
▽ △
PUMP CASING
### ℃
Fig. 6.2 Key operation for the pump operation status display screen
Current
ALARM/WARNING
Displayed on top of the menu when ALARM/WARNING happened.
Number of ALARM/WARNING shown on the upper right of the screen.
Control mode: LOCAL, REMOTE, COM
Running mode: NORMAL, S. ENERGY.
ALARM:CASING
ENTER
TEMP.HIGH
Alarm history
▽ △
(Indication of history)
WARNING:BP MOTOR
TEMP.HIGH
Pump unit No.
Total operation time
Back pressure (option)
Pump N2 gas flow
Cooling water flow
Casing temp.
Motor speed
ENTER
ENTER
How to read the alarm history
Alarm 1st code
History No.
(The lower number. is newer.)
Occurrence date
See Table 6.2 for the alarm codes.
(27)
001 06 00 ####
020901 12:23:21
Displayed during ENTRY key pushed
002 51 00 ####
020901 12:25:26
Displayed during ENTRY key pushed
Alarm 2nd code
Analog value
002 51 00 ####
020901 12 : 25 : 26
EBARA
Corporation

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