EBARA ESA70W Instruction Manual page 75

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Abnormal symptom
Circuit breaker is activated.
(Leakage detector is on.)
Power LED does not come
on.
Nothing appears on LCD
WRONG SELECTION is
displayed on the display.
MP does not start when
applying START button.
MP does not start when
entering external "MP start"
signal input.
BP does not start.
Abnormal noise
Excessive vibration
Vacuum pressure increase.
**MEMORY ERROR** is
displayed on LCD after
activating ELB or changing
the dip switch setting
Check Item
Incorrect wiring
Short circuit
No power supply to pump.
Connector is not connected.
ELB is not ON.
ELB is not ON.
Instrument failure
The rotary switch is not set correctly.
"Remote" mode has been selected.
Start-up conditions are not satisfied.
("Startfail" is displayed.)
The LCD Controller select switch is not
set correctly
Instrument failure
"Local" mode has been selected.
"Alternate" mode has been selected.
(Pump jogs.)
Instrument failure
BP start signal is not entered in
REMOTE mode.
Instrument failure
Adjustment feet are not applied.
Some object is making contact with the
outer cover.
The fastening screws of the outer corer
have worked themselves loose.
Parts of the pump are damaged.
Accumulation of by-products in pipes.
N2 pressure setting is high.
Leak from vacuum piping.
Accumulation of by-products in pumps. Replace or overhaul pump.
The dilution N2 gas control valve has
been opened too much.
None
Corrective Action
Check wiring.
Replace or overhaul pump.
Check power supply.
Connect power connector.
Place ELB to ON.
Place ELB to ON.
Replace instruments.
Adjust the rotary switch setting.
Set switch to "Local" mode.
Satisfy all start-up conditions.
Adjust the LCD controller select
setting.
Replace instrument.
Set switch to "Remote".
Enter "Alternate" start signal input.
Set to "Momentary" mode.
Replace instrument.
Enter the start signal.
Replace instruments.
Use the adjustment feet.
Remove the object.
Tighten the fastening screws.
Replace or overhaul pump.
Clean piping.
Set pressure for correct value.
Check piping.
Adjust the N2 flow rate as
appropriate.
Need "Countermeasure against
electric Noise" to pump.
EBARA
Corporation