6. LCD Controller ............................................................................................24
6.1 LCD Outline........................................................................................... 24
6.2 LCD Indication ...................................................................................... 25
6.4 Dip Switch ............................................................................................. 35
7. Operation..................................................................................................... 42
7.1 Before Starting...................................................................................... 42
7.2 START/STOP ......................................................................................... 45
8.1 Internal energies ................................................................................... 49
8.1.1 Power source ..................................................................................... 49
8.1.2 Cooling water..................................................................................... 49
8.1.3 Nitrogen gas....................................................................................... 49
8.4 Lubricant Oil ......................................................................................... 53
8.7 Overhaul ................................................................................................ 59
10. Troubleshooting........................................................................................ 62
(xi)
EBARA
Corporation