EBARA ESA70W Instruction Manual page 24

Power
Earth Leakage Breaker
P
N Gas
2
Regulator
Water
Cooling Water Flow Sensor
LCD Controller
Control
Connector
Control Circuit
(ELB)
Motor Starter
Motor Starter
Pressure Gauge
N Gas Flow Sensor
2
FT1
FT2
Figure 3.3 System Flow
Gas Inlet
Main Pump
Motor
(MP)
Main Pump
Motor
(MP)
(11)
Gas Outlet
Check
Valve
EBARA
Corporation