EBARA ESA70W Instruction Manual page 56

Operate the N gas selector valve in accordance with the dilution N
2
DIP switch-A No. 7.
If DIP Switch is set to OFF
If DIP Switch is set to ON
[ NOTE ] For normal operation, open the N
set close the valve when the production process does not lead to the
formation of reaction by-products in the pump or when the process
uses non-corrosive gases.
[ NOTE ] The N
gas selector valve is positioned on the front panel at the right
2
when viewing facing the pump front panel (operating panel).
[ NOTE ]
It takes 10 odd seconds until the flow has stabilized after you have
operated the N
(3) Turn on the power supply to the pump.
(4) The LCD controller counts down 10 seconds after placing the Earth Leakage
Breaker (ELB) into the ON position.
[ NOTE ] The pump cannot start while the measuring instruments are warming
up for 10 seconds after the ELB is placed in the ON position.
(5) Check on the WATER FLOW display of the LCD Controller that the cooling
water flow rate is 3.5 L/min. or more.
(6) Re-check on the PUMP N
dilution N gas flow rate is within the 24- 27Pam3/s range. Also check that the
2
pressure gauge shows a reading of 0.04 - 0.07MPa.
After setting the pressure, press the red stopper to lock the knob in position.
In this condition, the shaft sealing N
(The shaft sealing N
displayed on the LCD controller.)
2
gas selector valve.
2
FLOW display of the LCD Controller that the
2
flow rate is 4.5 – 6.0 Pam3/s.
2
flow rate is contained in pump N
2
Open Valve.
Close Valve.
gas selector valve. To save N
flow rate currently
2
(43)
mode set by
2
gas
2
EBARA
Corporation