Control Signal Wiring - EBARA ESA70W Instruction Manual

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4.3.3 Control Signal Wiring

This dry pump is uipped with signal input and output connectors, which allow
external tools and control devices to remotely operate and monitor the pumps.
Connect wires to the control connector for remote operation and remote
monitoring.Tables 4.4 and 4.5 and Figs. 4.5 and 4.6 show the pin assignment.
Connector No.
CN-Z
CN-Y
Fig. 4.5 15 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Pin. No. Signal name
1 MP START/STOP (+)
2 BP START/STOP (+)
3 MP START/STOP STATUS (+)
4 BP START/STOP STATUS (+)
5 WARNING STATUS (+)
6 ALARM STATUS (+)
7 REMOTE STATUS (+)
8
9 MP START/STOP (−)
10 BP START/STOP (−)
11 MP START/STOP STATUS (−)
12 BP START/STOP STATUS (−)
13 WARNING STATUS (−)
14 ALARM STATUS (−)
15 REMOTE STATUS (−)
Table 4.4 Receptacle Specification
Connector type
15 pin D sub-miniature Female receptacle
25 pin D sub-miniature Female receptacle
8 1
15 9
Table 4.5 Control Connector Pin Assignment(CN-Z)
(Applicable for SEMI E73-0299)
Screw lock size : M2.6
Contact pin surface : Au
I/O
IN
IN
OUT
OUT
OUT
OUT
OUT
Signal type
Run : CLOSE, Alternate
Run : CLOSE, Alternate
Run : CLOSE, Alternate
Run : CLOSE, Alternate
WARNING : OPEN, Alternate
ALARM : OPEN, Alternate
REMOTE : ON
EBARA
Corporation