EBARA ESA70W Instruction Manual page 69

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8.5 Spare (Maintenance) Parts List
Following parts are needed for maintenance in customers' site.
Table. 8.2
1. Standard consumption Part.
Parts Name
PFPE oil
PFPE oil
2. Recommendable Part for Safe Operation.
Parts Name
O-ring (Viton A)
3. Recommendable Parts for Quick Maintenance.
Parts Name
Exhaust check valve
4. Recommendable Spare Parts. (Not needed for each pump.)
Parts Name
Oil level switch
Oil level gauge
Water flow sensor
N2 flow sensor
Thermo couple sensor bolt
N2 gas pressure regulator
(EC:EBARA CORPORATION, ETI:EBARA TECHNOLOGIES INCORPORATED)
Following labels are attached to pump covers. When they are hard to read for discoloring
or peeling off, please stick them again as directed in the Warning Label drawings.
[DANGER] HAZARDOUS WAIGHT DANGER LABEL
[WARNING] HAZARDOUS VOLTAGE WARNING LABEL
[WARNING] HIGH TEMPERATURE WARNING LABEL
[WARNING] HAZARDOUS MATERIAL WARNING LABEL
[WARNING] EYEBOLTS HIGH TEMPERATURE WARNING LABEL
[CAUTION] CHARGE MARK LABEL
Type
BARRIERTA J100
BARRIERTA J100ES
Type
NW25
NW40
G55 (For Exh. check valve)
Type
32X80L
Type
-----
-----
10 L/min
84.4 Pa m3/s
T TYPE, M8
R31-200-C121
Table. 8.3 Labels
Label Name
EC Part No.
C-0402-000-0011
C-0402-000-0111
EC Part No.
C-1210-351-0001
C-1210-352-0001
C-1210-089-0201
EC Part No.
C-2244-031-0001
EC Part No.
C-5222-005-0011
C-5222-004-0001
C-5137-008-0001
C-5138-062-0111
C-1019-121-0001
C-2250-101-0001
Part No.
C-7110-316-0001
C-7110-313-0001
C-7110-312-0001
C-7110-314-0001
C-7110-317-0001
C-7110-315-0001
EBARA
Corporation