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10. Troubleshooting
10.1 Troubleshooting (1) Basic trouble
WARNING
WARNING
WARNING
Interrupt Earth Leakage Breaker (ELB) before starting on wiring and
maintenance work.
Do not switch on the power supply to the pump until work is completed.
The pump casing and exhaust piping become extremely hot during operation
and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact with humans or
inflammable substances.
Do not remove the pump cover during operation.
Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air into
the pump. When checking for gas leaks by pressurization, please
pressurize by less than 0.05 MPa into the purge port and
do check.
(61)
EBARA
Corporation
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Table of Contents
Troubleshooting
