EBARA ESA70W Instruction Manual page 6

(iv)
Exhaust from pumps handling process gases should be connected to an
WARNING
appropriate exhaust abatement system that is equipped with discharge quality
monitors to provide warnings and shut down the process gas flow if gas
concentrations exceed allowable limits.
Check for gas leaks after installing and maintaining the piping.
WARNING
Gas leaks will result in the discharge of harmful and dangerous substances and
in abnormal reactions due to the ingress of air into the pump. When checking for
gas leaks by pressurization, please pressurize by less than 0.05 MPa into the
purge port and do check.
Do not alter the pump member nor change any parts without EBARA's consent or
WARNING
approval.
The pump casing and exhaust piping become extremely hot during operation and
WARNING
remain hot for some time after stopping.
Be sure that pump and exhaust piping do not come in contact with humans or
inflammable substances.
Do not remove pump enclosure panels during operation
Check Safety Interlock functions periodically (every 6 months) to confirm correct
WARNING
operation.
Disposal of process by-products shall be strictly in accordance with all local and
CAUTION
national environmental and safety regulations
Disposal of Printed circuit board containing lithium battery shall be strictly in
CAUTION
accordance with all applicable local and national environmental regulations.
In designing the dry pumps, Ebara does not assume risks caused by hazardous
WARNING
chemical reactions resulted from simultaneous injection or mixture of multiple
process gases in the pumps, and the pump is not equipped with a protection
against the dangers from such pump usage. The tool suppliers and users must
pay attention not to simultaneously inject or mix those gases.
Do not perform a withstand voltage test.Failure to comply could
WARNING
result in damage to the sensitive devices.
EBARA
Corporation