EBARA ESA70W Instruction Manual page 77

Multi-stage dry vacuum pump
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(64)
Display
WARN: WATER
FLOW LOW ##.#
WARN: PUMP N2
FLOW LOW ##.#
WARN: MP MOTOR
TEMP HIGH ##.#
WARN: BP MOTOR
TEMP HIGH ##.#
WARN: BP
COMM. ERROR
WARN: IO
COMM. ERROR
WARN: BP DRIVER
TEMP HIGH ###
WARN: PUMP BOX
TEMP HIGH
WARN:BP
CURRENT HIGH
WARN:
OIL LEVEL LOW
WARN:PUMP N2
VALVE ERROR
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the WARNING signal still remains, the WARNING display will
appear again even after you have reset.
Symptom
Water flow is reduced.
PUMP N2 flow is
reduced.
Booster Pump (BP)
motor coil temp.
rises.
Main Pump (MP)
motor coil temp.
rises.
Communication is not
established.
Booster Pump (BP)
driver temp. rises.
Temp. rises in pump
cover.
BP current rises.
Oil level is low.
N2 valve open.
Check Item
Coupler is disconnected.
Pressure is not sufficient.
Root valve is closed.
Water pipe is clogged.
Tube fittings are loosened.
Instrument failure
Outlet & inlet pipes are
reverse. (flow value 0 L/min)
N2 port is not connected.
Primary pressure is
insufficient.
Regulator setting value
LOW.
N2 pipe is clogged.
Leaks on N2 pipe.
Instrument failure
Cooling water flow is
reduced.
Motor failure
Connection error of the
instrumented units
Instrument failure
Duct ventilation insufficient
Cooling water flow is
reduced.
Duct ventilation not
sufficient
Cooling water flow is
reduced.
Rotor makes contact.
MP performance down
Instrument failure
Check oil level.
(See Fig.8.1)
Setting is N2 0 mode
Corrective Action
Connect coupler.
Apply sufficient pressure.
Open valve.
Clean or replace piping.
Re-tighten.
Replace instrument.
Connect pipes correctly.
Connect N2 pipe fitting.
Apply sufficient pressure.
Increase pressure setting.
Replace N2 piping.
Check the fittings.
Replace instrument.
Cool pump thoroughly and
reset.
Replace or overhaul pump.
Check the connection of the
instrumented unit.
Replace instrument.
Ventilate sufficiently.
Increase cooling water flow.
Ventilate sufficiently.
Increase cooling water flow.
Replace or overhaul pump.
Check exhaust pipe &
silencer.
Replace instrument.
Charge lubrication oil.
Close N2 valve.
(at the side of pump)
EBARA
Corporation

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