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EBARA ESA70W Instruction Manual page 23

Multi-stage dry vacuum pump
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(10)
Performance Curve(Model ESA70WN)
10000
1000
100
10
1
0.1
1
10000
1000
100
10
1
0.1
1
10
100
Inlet Pressure (Pa)
10
100
Inlet Pressure (Pa)
at 50Hz
1000
10000
1000
10000
EBARA
Corporation
100000
at60Hz
100000
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